| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide plasma density suitable for a plasma treatment intended to be executed. <P>SOLUTION: This plasma treatment device is provided with a microwave guide tube 1 with a slot antenna 5 attached to its bottom face; a microwave introduction window 2 for forming a surface wave from the microwave introduced through the slot antenna 5 and transmitting it; an airtight vessel 10 for treating a treatment object by a surface wave-excited plasma; and closing reflectors 6 each having a reflecting surface R facing the outer peripheral side surface 2a of the introduction window 2. By moving the closing reflectors 6, the distance d between the reflecting surface R and the side surface 2a is adjusted. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
