Online material consumption monitoring system and method for monitoring material within a wafer fabrication facility

摘要

An online monitoring system is provided having a computer having a GUI having a build of material display; a material warehouse in communication with a manufacturing execution system ("MES") for controlling execution of a plurality of recipes used to make an associated product; a capacity consumption system ("CCS") for determining future processing capacity within a wafer fabrication facility in accordance with a total material consumption algorithm. A method of use having the steps of: providing a representative material for consumption within a fabrication facility; calculating a total amount of the representative material consumed within a wafer fabrication facility in accordance with a material consumption algorithm, wherein the material consumption algorithm is calculated using a plurality of variables; and benchmarking material usage by each piece of fabrication equipment disposed within one or a plurality of fabrication facilities to help plan for future material usage and to improve fabrication production.