| 发明名称 |
APPARATUS FOR ATTACHMENT OF SEMICONDUCTOR HARDWARE |
| 摘要 |
A plasma processing method and system including an apparatus and method for securing semiconductor hardware without the use of exposed threaded hardware. Consistent mechanical and electrical contact between parts in the assembled condition can also be achieved. |
| 申请公布号 |
WO2004079778(A2) |
申请公布日期 |
2004.09.16 |
| 申请号 |
WO2004US03361 |
申请日期 |
2004.02.26 |
| 申请人 |
TOKYO ELECTRON LIMITED;FINK, STEVEN, T. |
发明人 |
FINK, STEVEN, T. |
| 分类号 |
H01J37/32 |
主分类号 |
H01J37/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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