发明名称 VIBRATION REMOVER
摘要 PROBLEM TO BE SOLVED: To make a spring constant in a direction orthogonal to a support direction approximate zero while generating support force in the support direction. SOLUTION: A vibration remover includes a first permanent magnet having a first magnetized surface and a second magnetized surface which are magnetized with different polarities respectively, a second permanent magnet which has a third magnetized surface magnetized with the same polarity as the polarity of the first magnetized surface and a fourth magnetized surface magnetized with the same polarity as the polarity of the second magnetized surface, is constituted so that the first and third magnetized surfaces face the second and fourth magnetized surfaces, and generates the support force for supporting the first permanent magnet in the support direction according to the size of facing portions, and a yoke holding the second permanent magnet and generating suction force between the first permanent magnet and the yoke in a normal direction of facing surfaces. The size in an in-plane direction of the magnetized surfaces of the first and second permanent magnets satisfies the relation of the size in an in-plane direction of the second permanent magnet>the size in an in-plane direction of the first permanent magnet. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004257424(A) 申请公布日期 2004.09.16
申请号 JP20030046223 申请日期 2003.02.24
申请人 CANON INC 发明人 KORENAGA NOBUSHIGE
分类号 G03F7/20;F16F15/00;F16F15/02;F16F15/03;H01F7/02;H01L21/027;H02K7/09;H02K41/02;(IPC1-7):F16F15/03 主分类号 G03F7/20
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