发明名称 |
Correcting a mask pattern using a clip mask |
摘要 |
Correcting a mask pattern includes partitioning the mask pattern to yield templates. The following is repeated for each template to generate correction data: a clip mask is generated for a template selected as a main template; the main template is merged with context templates to yield a merged template; the merged template is divided to yield segments including clip segments, where an intersection of the clip mask and the merged template defines an endpoint of a clip segment; a proximity correction procedure is performed on the segments to yield a corrected template; and correction data of the corrected template is selected according to the clip mask. The correction data for the templates are aggregated to correct the mask pattern.
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申请公布号 |
US2004181767(A1) |
申请公布日期 |
2004.09.16 |
申请号 |
US20030386286 |
申请日期 |
2003.03.10 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
SOPER ROBERT A. |
分类号 |
G03F1/14;G06F17/50;(IPC1-7):G06F17/50 |
主分类号 |
G03F1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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