| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a SEMI wafer map server with which history retrieval and re-operation of map data are made simple and to provide a communication method of the server. <P>SOLUTION: In the SEMI wafer map server 4, data on a prescribed wafer 1 acquired by a semiconductor manufacturing device 3 is stored as wafer map data 6 by using semiconductor manufacturing device communication standard (SECS) communication 5 of semiconductor specification (SEMI). Data generation time is stored in wafer map data 6 to a second unit as a history item. Thus, the item combined with wafer ID 2 is not overlapped in terms of an operation, and it can be treated as history information showing when it is worked. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
