LOAD-LOCK CHAMBER FOR SEMICONDUCTOR DEVICE MANUFACTURE INCLUDING SENSOR FOR POSITION CONTROL OF WAFER CASSETTE

摘要

PURPOSE: A load-lock chamber for semiconductor device manufacture including the sensor for position control of a wafer cassette is provided to prevent collision between an elevator or a wafer cassette and an upper part or a lower part of a main body of the load lock chamber by installing a sensor in the inside of the main body of the load lock chamber. CONSTITUTION: A wafer cassette is used for storing a wafer. A main body(200) includes a door into which the wafer cassette is inserted. An elevator(240) is installed in the inside of the main body in order to elevate the wafer cassette. A driver(250) is used for operating the elevator. A controller(260) is used for controlling the driver. The wafer cassette includes a wafer cassette position control sensor. The first sensor(220) is installed at an upper part of the inside of the main body in order to detect a rising limit of the wafer cassette. The second sensor(230) is installed at a lower part of the inside of the main body in order to detect a falling limit of the wafer cassette.