Holder for disc-like substrates,申请号EP19970890228-传众专利搜索

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发明名称	Holder for disc-like substrates
摘要
申请公布号	EP0844646(B1)	申请公布日期	2004.09.15
申请号	EP19970890228	申请日期	1997.11.14
申请人	SEZ AG	发明人	PIRKER, WILLIBALD
分类号	C23F1/08;H01L21/02;H01L21/683;H01L21/687;(IPC1-7):H01L21/00	主分类号	C23F1/08
代理机构		代理人
主权项
地址

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