| 摘要 |
<p>A process for failure monitoring of an optical component, especially a protective glass using two optical systems of a laser processing unit (LPU), especially a laser processing head, where the LPU is so arranged that an object is irradiated with a laser beam via the first optical system, where an emission zone is produced on the object at the irradiation site, and via the second optical system an image of the failure in the object is formed. Independent claims are included for: (1) a laser processing unit for irradiation of a workpiece with laser radiation (13) for failure monitoring of an optical component (1); (2) a failure monitoring device including an image producing sensor system. (8).</p> |
