SPUTTER ETCHING EQUIPMENT,申请号JP19860188122-传众专利搜索

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发明名称	SPUTTER ETCHING EQUIPMENT
摘要
申请公布号	JPS6344728(A)	申请公布日期	1988.02.25
申请号	JP19860188122	申请日期	1986.08.11
申请人	FUJITSU LTD	发明人	FURUSAWA TAKASHI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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