发明名称 Gas supply apparatus and gas supply method
摘要 This gas supply apparatus supplies a gas by vaporizing a liquefied gas filled in a gas container. This apparatus includes an installation stand having an upper surface on which the gas container is placed; at least one nozzle which discharges a beating medium towards a bottom surface of the gas container and is provided in a hole formed in the installation stand; and a heating medium discharge path which discharges the heating medium from a space between the bottom surface of the gas container and the upper surface of the installation stand.
申请公布号 US6789583(B2) 申请公布日期 2004.09.14
申请号 US20030353914 申请日期 2003.01.30
申请人 发明人
分类号 F17C7/00;C23C16/448;F17C7/04;F17C9/02;F17C13/02;F17C13/08;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):F28F9/22 主分类号 F17C7/00
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