| 摘要 |
An optical displacement-measuring apparatus has a scale on which optical gratings are formed along a first axis and a second axis. It also has a sensor head arranged opposite to the scale and relatively movable along the first and second axes. The sensor head includes a photosensitive unit (3) for optically detecting a relative movement to provide a displacement signal. The photosensitive unit (3) includes a transparent substrate (30). A photosensitive device array (PDAy) is formed with a semiconductor film deposited on the substrate (30) and arrayed along the first axis at a certain pitch for providing a displacement signal corresponding to a displacement along the first axis. A photosensitive device array (PDAx) is formed with a semiconductor film deposited on the photosensitive device array (PDAy) sandwiching an insulator layer therebetween and arrayed along the second axis at a certain pitch for providing a displacement signal corresponding to a displacement along the second axis.
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