发明名称 SEMICONDUCTOR MEMORY CELL AND METHOD FOR PRODUCING SAID CELL
摘要 The invention relates to a semiconductor memory cell and a method for producing said cell. According to said method, the capacity (CFe) of a ferroelectric capacitor assembly, which is formed by the contact and/or a region of an essentially constant potential between the gate isolation region (GOX) and a ferroelectric region (16), the ferroelectric region (16) and an upper gate electrode (18), is configured in a reduced manner relative to conventional conditions and/or relative to the capacity (CGOX) of a gate insulation capacitor assembly, which is formed by the border surface between a channel region (K) and the gate insulation region (GOX), the gate insulation region (GOX) and the contact and/or the region of an essentially constant potential between the gate isolation region (GOX) and the ferroelectric region (16).
申请公布号 WO2004077574(A2) 申请公布日期 2004.09.10
申请号 WO2004DE00365 申请日期 2004.02.27
申请人 INFINEON TECHNOLOGIES AG;PINNOW, CAY-UWE;MIKOLAJICK, THOMAS 发明人 PINNOW, CAY-UWE;MIKOLAJICK, THOMAS
分类号 H01L21/28;H01L21/336;H01L29/78 主分类号 H01L21/28
代理机构 代理人
主权项
地址