| 发明名称 |
METHOD OF DETERMINING THE ENDPOINT OF A PLANARIZATION PROCESS |
| 摘要 |
A method of determining the endpoint of a planarizing process is disclosed. An endpoint detection signal is selectively sampled from at least one predetermined location within a planarizing region defined on a planarizing web. Planarization is stopped when the endpoint criterion based on the endpoint detection signal is detected.
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| 申请公布号 |
US2004176015(A1) |
申请公布日期 |
2004.09.09 |
| 申请号 |
US20030248950 |
申请日期 |
2003.03.05 |
| 申请人 |
LAHNOR PETER;KUEHN OLAF;ROEMER ANDREAS;SIMPSON ALEXANDER |
发明人 |
LAHNOR PETER;KUEHN OLAF;ROEMER ANDREAS;SIMPSON ALEXANDER |
| 分类号 |
B24B49/00;(IPC1-7):B24B49/00;B24B51/00 |
主分类号 |
B24B49/00 |
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