发明名称 |
Plasma processing apparatus and method |
摘要 |
Disclosed herein is a plasma processing apparatus and a plasma processing method capable of performing plasma processing by performing temperature control of a sample table in accordance with a process step to be performed on a sample. The plasma processing apparatus performs plasma processing on a sample in accordance with a process recipe with the sample being placed on a sample table in which each of a plurality of areas is temperature-controlled by a temperature control means, wherein the process recipe includes a plurality of temperature setting parameters for the sample table, and the plasma processing is performed on the sample in accordance with the process recipe which is prepared for each of a plurality of process steps.
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申请公布号 |
US2004173311(A1) |
申请公布日期 |
2004.09.09 |
申请号 |
US20030377885 |
申请日期 |
2003.03.04 |
申请人 |
ICHIMARU TOMOYOSHI;YOSHIGAI MOTOHIKO;YAMAMOTO HIDEYUKI;IKUHARA SHOJI;KAGOSHIMA AKIRA |
发明人 |
ICHIMARU TOMOYOSHI;YOSHIGAI MOTOHIKO;YAMAMOTO HIDEYUKI;IKUHARA SHOJI;KAGOSHIMA AKIRA |
分类号 |
H01L21/00;(IPC1-7):C23F1/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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