| 摘要 |
PROBLEM TO BE SOLVED: To provide a process for refining chlorosilanes by efficiently converting boron and/or phosphorus in crude chlorosilanes to a high boiling point component without causing problems such as clogging of pipings and corrosion, and necessitating particular installations. SOLUTION: Liquid alkoxysilanes are added to the crude chlorosilanes containing boron and/or phosphorus followed by distillation. The liquid akoxysilanes are preferably those having 4-8C alkyl groups. Also, it is preferable that equivalent moles or more of the liquid alkoxysilanes to boron and/or phosphorus are added. COPYRIGHT: (C)2004,JPO&NCIPI
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