| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a process for fabricating a thin film solar cell in which a substrate having various properties can be used, and micro protrusions/recesses indispensable to enhancement of efficiency of the thin film solar cell are formed. <P>SOLUTION: The thin film solar cell is fabricated by (a) forming a layer C removable selectively by etching on a temporary substrate A on which an etching protective layer B having a protruding/recessed surface is formed, (b) leaving an exposed region at a part of the selectively removed layer C and sequentially forming a transparent electrode layer D, a photoelectric conversion layer E and a rear surface electrode layer F on the remaining region, (c) forming external connection terminals, (d) forming a resin layer G and bonding a supporting substrate H having any one property of flexibility, lightweight and non-heat resistance, and (e) removing the selectively removed layer C by etching thereby separating the temporary substrate side and the solar cell body side. The thin film solar cell is then transferred to a substrate having various properties. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
