| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration piezoelectric acceleration sensor element for precisely detecting acceleration without being affected by temperature, and also to provide a sensor and a device using the vibration piezoelectric acceleration sensor element. SOLUTION: In the vibration piezoelectric acceleration sensor element, vibration is generated in the thickness or width direction by the longitudinal expansion and contraction of a piezoelectric thin film 13 for detecting acceleration from the resonance frequency of the vibration on a diaphragm 10, a support 11 for retaining the diaphragm 10, a lower electrode 12 formed on the diaphragm 10, a piezoelectric thin film 13 formed on the lower electrode 12, and an upper electrode 14 formed on the piezoelectric thin film 13. A high resonance frequency change rate is obtained by acceleration, thus precisely detecting acceleration without being affected by a temperature change. COPYRIGHT: (C)2004,JPO&NCIPI
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