| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a combined lens by which optical axis adjustment is simplified and manufacturing processes are simplified by forming a lens by utilizing another lens. SOLUTION: An exposure optical system comprises a gray scale mask 23 which is a mask partially varied in the transmittance of light and imparts an intensity modulation to UV light, a lens 24 and a first lens 1. A pattern of the second lens is formed on a resist layer 13 by irradiating the first lens 1 with the UV light through the gray scale mask 23 and exposing a resist layer 13 with the light transmitted through the first lens. The second lens is thereafter formed by etching a glass plane substrate 12. COPYRIGHT: (C)2004,JPO&NCIPI
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