Method of short pulse hole drilling without a resultant pilot hole and backwall damage

摘要

A method for removing material via a laser so as to reduce the formation of channels comprising the steps of emitting a laser pulse comprising a pulse energy, a pulse duration, and a fluence towards a surface of a drilling material the fluence of a value sufficient to avoid the formation of a channel in the drilling material at the surface to form a hole comprising a side wall and a bottom, shaping a spatial profile of the laser pulse such that the fluence is substantially uniform across the spatial profile; and emitting at least one subsequent laser pulse having a pulse energy, a pulse duration, and a fluence sufficient to avoid the formation of a channel at the bottom of the hole.