| 摘要 |
PROBLEM TO BE SOLVED: To enable the position of rotation starting origin of a high-speed rotary table to determine accurately in a short period of time, and delicate operation to a high-speed rotary table portion from outside such as injection of a sample, movement of a member on a table or the like to perform automatically. SOLUTION: A high-speed rotary table apparatus is used, which is provided with the high-speed rotary table having a V-shaped groove at the outer peripheral part, a pin stopper capable of loose fitting to the V-shaped groove, a detecting mechanism detecting an origin position and a predetermined position on this side of the origin, a high-speed rotation driving mechanism, and a low-speed rotation driving mechanism. Position detection is carried out during low-speed rotation, the rotation is stopped promptly, and the pin stop is fitted into the V-shaped groove. COPYRIGHT: (C)2004,JPO&NCIPI
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