| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve the working efficiency when a photomask is replaced with another one of different size in a photomask holder that fixes a photomask at a predetermined position in various devices such as an exposure device. <P>SOLUTION: The photomask holder 1 places the photomask P formed into a plane view rectangular plate-like shape at a predetermined position in various devices. The photomask holder 1 comprises: a plurality of mask contact parts 15 having a contact surface 15a that comes into contact with each side P1 of the photomask P; and a linear movement mechanism 14 that enables at least one of the mask contact parts 15 in opposition to each other with the photomask P in between to reciprocate in the direction in which the mask contact part 15 comes near to/departs from the photomask P. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
