| 摘要 |
PROBLEM TO BE SOLVED: To provide a lapping device which presses a lapping film onto a surface to be machined, of a workpiece by using a plurality of roller shoes radially movable to the workpiece, thereby positively bringing the shoes into contact with the workpiece, and substantially increases a contact area between the shoes and the workpiece, thereby efficiently carrying out finishing machining of the workpiece with high efficiency. SOLUTION: The lapping device is constructed by arranging the plurality of roller shoes R which are radially movable to the workpiece W, on a rear side of the lapping film 1, and separating the lapping film 1 from the surface to be machined, of the workpiece W by separating members S arranged between the respective roller shoes R. Thus, the lapping film 1 corresponding to areas of the plurality of roller shoes R, positively makes contact with the surface to be machined, of the workpiece W, and therefore the contact area between the roller shoes R and the workpiece W is substantially increased, whereby finishing machining of the workpiece W is carried out with high efficiency. COPYRIGHT: (C)2004,JPO&NCIPI |
