| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing carbon nanotubes capable of growing carbon nanotubes on a very thin film composed of a catalyst metal formed on a substrate. SOLUTION: An ion containing carbon and having a specified energy is injected on the substrate 20 having a surface composed of a Pd thin film 22 to introduce the carbon into the inside of the substrate 20; thereby, the substrate 20 is heated by the energy in injection and a mixture of the catalyst metal and the carbon is formed. The injection is continued further to introduce the carbon up to more than the solid solubility limit value of the catalyst metal, and then the substrate 20 is cooled down to room temperature to crystallize the carbon on the catalyst metal as nuclei, thus growing carbon nanotubes 23 on the surface of the substrate 20. COPYRIGHT: (C)2004,JPO&NCIPI
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