| 摘要 |
PROBLEM TO BE SOLVED: To enable transportation of workpieces after grinding that is removed without damage by retaining the workpieces corresponding to sizes and shapes of the individual workpieces when machining the workpieces having individual sizes and shapes. SOLUTION: A frame fixture attached to a chuck table 11 that is composed of a chuck 13 and a chuck body 14 is provided, which is constituted of a frame supporting frame 15, supporting a frame 29 retaining the workpiece 27 via an adhesive tape 28, and a pushing ring 16, pushing the frame 29 supported by this frame supporting frame 15 against the frame 15. The pushing ring 16 is composed of a pushing portion 17, pushing the frame 29, and a portion 18 to be engaged, engaging the frame supporting frame 15, detachably. The frame supporting frame 15 is composed of a fixing portion 19, fixing the pushing ring 16 by engaging the portion 18 to be engaged of the pushing ring 16 to be engaged, and a frame supporting portion 20, supporting the frame 29. COPYRIGHT: (C)2004,JPO&NCIPI |
