| 摘要 |
PROBLEM TO BE SOLVED: To stably obtain an inclined beam when operating an optical MEMS (Micro Electronic Mechanical System) element. SOLUTION: The MEMS element comprises a substrate side electrode 23 and a beam 29 having a driving side electrode 28 driven by an electrostatic force to operate between the electrodes 23 and 28. One side of the beam 29 is supported by a first support pole 25, a second support pole 26 with a height lower than the first support pole 25 is disposed oppositely to the other side of the beam 29, the other side of the beam 29 is abutted on the second support pole 26, and the beam 29 is inclined. COPYRIGHT: (C)2004,JPO&NCIPI
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