A DEVICE AND METHOD FOR STACKED MULTI-LEVEL UNCOUPLED ELECTROSTATIC ACTUATORS

摘要

A multi-axis electromechanical actuator device and method with no electrostatic coupling between the axes. The absence of coupling between the different axes of rotation is achieved by stacking each actuator over the deformable element of the previous level. This device and method is used to achieve dual-axis scanning with a fixed and independent electromechanical response of each axis.