LAPPING APPARATUS AND LAPPING METHOD

摘要

PROBLEM TO BE SOLVED: To control the geometrical shape of a working surface along the axial direction of a work only under a machining condition. SOLUTION: This lapping apparatus includes: a lapping film 11; a shoe 21: a shoe pressing unit 30 pressing the shoe 21 toward the work 61 to press the abrasive grain surface of the lapping film 11 to the work 61 and freely adjusting the shoe pressing force; an oscillation unit 50 for applying oscillation to the work 61; a rotary encoder S2 for detecting the relative oscillation position of the work 61 to the lapping film 11 in oscillation; and a controller 100. The controller 100 variably controls the shoe pressing force according to the oscillation position of the work in the process of machining, thereby controlling the geometrical shape of the working surface along the axial direction of the work 61 to be flat, medium-projected or medium-recessed. COPYRIGHT: (C)2004,JPO&NCIPI