METHOD OF SUPPLYING SPUTTERING TARGETS TO FABRICATORS AND OTHER USERS

摘要

A method of supplying a sputter target, including, supplying a sputtering target assembly to a user or an agent thereof where a sputter target of the sputtering target assembly is sputtered to form a spent target assembly; determining an amount of the sputter target consumed by the sputtering; and charging the user based on the amount sputtered or an amount not returned, is described.