WAFER TRANSFER APPARATUS AND METHOD FOR TRANSFERRING WAFER USING THE SAME

摘要

PURPOSE: A wafer transfer apparatus is provided to minimize damage to a lot due to a wafer edge damage and maximally reduce contamination of production equipment by detecting whether a wafer is normally aligned before the wafer is transferred. CONSTITUTION: A plurality of wafers(100) are received in a boat(10) for performing a diffusion process in a diffusion furnace. A transfer(20) unloads the wafer received in the boat. The transfer including a sensor(30) senses the wafer aligned on the boat before the wafer is unloaded from the boat, so as to detect a damaged wafer(110). The sensor may be a photosensor.