发明名称 Magnetoresistive random access memory device structures
摘要 A method for fabricating an MRAM device structure includes providing a substrate on which is formed a first transistor and a second transistor. An operative memory element device is formed in electrical contact with the first transistor. At least a portion of a false memory element device is formed in electrical contact with the second transistor. A first dielectric layer is deposited overlying the at least a portion of a false memory element device and the operative memory element device. The first dielectric layer is etched to simultaneously form a first via to the at least a portion of a false memory element device and a second via to the operative memory element device. An electrically conductive interconnect layer is deposited so the electrically conductive interconnect layer extends from the at least a portion of a false memory element device to the operative memory element device.
申请公布号 US6784510(B1) 申请公布日期 2004.08.31
申请号 US20030417851 申请日期 2003.04.16
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 GRYNKEWICH GREGORY W.;DEHERRERA MARK;DURLAM MARK A.;TRACY CLARENCE J.
分类号 G11C;G11C8/02;H01L21/00;H01L21/8246;H01L27/22;H01L29/00;H01L29/82;(IPC1-7):H01L29/00 主分类号 G11C
代理机构 代理人
主权项
地址