发明名称 Electric discharge gas laser
摘要 There is provided an electric discharge gas laser comprising a housing, a rotating fan, a bearing device and a control. The housing contains a laser gas. The rotating fan is provided in the housing to circulate the gas in the housing. The bearing device magnetically supports a rotating shaft. The bearing device is provided with a sensor device comprising a sensor and a signal processor. The sensor senses the position of the rotating shaft to generate signals indicating the position of the rotating shaft. The signal processor receives and processes the signals delivered from the sensor to output processed signals. The control is separated from the bearing device and is functionally associated with the bearing device to receive the processed signal from the sensor device for controlling the bearing device on the basis of the processed signals.
申请公布号 US6785314(B2) 申请公布日期 2004.08.31
申请号 US20010876032 申请日期 2001.06.08
申请人 EBARA CORPORATION 发明人 OOYAMA ATUSHI;SEKIGUCHI SHINICHI;SHINOZAKI HIROYUKI;BARADA TOSHIMITSU;NAKAZAWA TOSHIHARU
分类号 F16C32/04;F16C39/06;H01S3/03;H01S3/036;H01S3/225;H02K7/09;H02K7/14;(IPC1-7):H01S3/09 主分类号 F16C32/04
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