发明名称 Process of fabricating a precision microcontact printing stamp
摘要 A process of making a high precision microcontact printing stamp in which an elastomeric monomer or oligomer is introduced into a mold wherein a photoresist master imprinted with a microcircuit design in negative relief is predisposed. The monomer or oligomer is cured at a temperature no higher than about ambient temperature whereby a distortion-free microcontact printing stamp having the microcircuit design of the photoresist master in positive relief is formed.
申请公布号 US6783717(B2) 申请公布日期 2004.08.31
申请号 US20020127373 申请日期 2002.04.22
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HOUGHAM GARETH;FRYER PETER;NUNES RONALD;ROTHWELL MARY BETH
分类号 B29C35/00;B29C35/08;B29C35/18;(IPC1-7):B29C33/40 主分类号 B29C35/00
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