发明名称 |
Process of fabricating a precision microcontact printing stamp |
摘要 |
A process of making a high precision microcontact printing stamp in which an elastomeric monomer or oligomer is introduced into a mold wherein a photoresist master imprinted with a microcircuit design in negative relief is predisposed. The monomer or oligomer is cured at a temperature no higher than about ambient temperature whereby a distortion-free microcontact printing stamp having the microcircuit design of the photoresist master in positive relief is formed.
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申请公布号 |
US6783717(B2) |
申请公布日期 |
2004.08.31 |
申请号 |
US20020127373 |
申请日期 |
2002.04.22 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HOUGHAM GARETH;FRYER PETER;NUNES RONALD;ROTHWELL MARY BETH |
分类号 |
B29C35/00;B29C35/08;B29C35/18;(IPC1-7):B29C33/40 |
主分类号 |
B29C35/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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