| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily deal with the change of a mask in a manufacturing process for semiconductor wafer. <P>SOLUTION: The wafer manufacture management device contains a treatment flow definition table 1202 storing manufacturing flow and mask level in a manufacturing process for every kind of wafers, a manufacturing basic information table 1200 storing a mask set name for every kind of wafers, a mask information definition table 1204 storing a plurality of mask names per mask set corresponding to a mask level, and a lot information table 1206 storing manufacturing flow and the kind of a wafer for every manufacturing lot. Furthermore, it contains a circuit for drawing a mask set name corresponding to the kind of a wafer stored for every manufacturing lot from the manufacturing basic information table 1200, a circuit for picking out a mask level based on a present process for every manufacturing lot and the treatment flow definition table 1202, and a circuit for drawing a mask name from the mask information definition table 1204 based on mask set name and mask level. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
