| 摘要 |
PROBLEM TO BE SOLVED: To provide a local oscillation signal generation device, and an inspection device and an inspection method for the local oscillation signal generation device capable of inspecting VCO (voltage control oscillator) efficiently. SOLUTION: A parallel control signal is inputted from an LSI (large scale integrated circuit) tester 51 into a parallel input terminal 12 of this local oscillation signal generation device 50 in order to inspect an oscillation frequency variable region of VCO 1. Hereby, the parallel control signal inputted through the parallel input terminal 12 is selected by a control signal selection circuit 14 and imparted to a PLL (phase locked loop) circuit 3, and the oscillation frequency of the VCO 1 which is an inspection object is changed, and the oscillation frequency variable region is confirmed. COPYRIGHT: (C)2004,JPO&NCIPI
|
