发明名称 |
METHOD FOR PLANARIZING BUMPED DIE |
摘要 |
According to one embodiment of the invention, a method for planarizing bumped die includes providing a die having a plurality of stud bumps, encapsulating the stud bumps with an epoxy-based material, and disposing a release layer outwardly from the epoxy-based material. A surface of the release layer that engages the epoxy-based material is substantially planar. The method further includes curing the epoxy-based material and removing the release layer after the curing step, thereby creating a substantially planar surface of the epoxy-based material. |
申请公布号 |
WO2004073059(A1) |
申请公布日期 |
2004.08.26 |
申请号 |
WO2004US01905 |
申请日期 |
2004.01.23 |
申请人 |
LOCKHEED MARTIN CORPORATION;STECHER, THOMAS, E. |
发明人 |
STECHER, THOMAS, E. |
分类号 |
H01L21/56;H01L21/68;H01L23/31 |
主分类号 |
H01L21/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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