发明名称 METHOD FOR PLANARIZING BUMPED DIE
摘要 According to one embodiment of the invention, a method for planarizing bumped die includes providing a die having a plurality of stud bumps, encapsulating the stud bumps with an epoxy-based material, and disposing a release layer outwardly from the epoxy-based material. A surface of the release layer that engages the epoxy-based material is substantially planar. The method further includes curing the epoxy-based material and removing the release layer after the curing step, thereby creating a substantially planar surface of the epoxy-based material.
申请公布号 WO2004073059(A1) 申请公布日期 2004.08.26
申请号 WO2004US01905 申请日期 2004.01.23
申请人 LOCKHEED MARTIN CORPORATION;STECHER, THOMAS, E. 发明人 STECHER, THOMAS, E.
分类号 H01L21/56;H01L21/68;H01L23/31 主分类号 H01L21/56
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