| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical modulation element and an optical modulation element array in which the lowering of an operation voltage is made compatible with the increase in the ON/OFF switching speed of the optical modulation element, and to provide an image forming device and a planar display device. SOLUTION: In the optical modulation element, a supporting base plate 6 having an electrode layer 4 and a movable thin film 9, which has at least an electrode layer 11 and is so arranged above the supporting base plate 6 as to be opposite to the supporting base plate 6 with a predetermined separation space and to be bent toward the supporting base plate 6, are provided, the optical characteristic is varied by bending the movable thin film 9 toward the supporting base plate 6 with an electrostatic force acting between both electrodes 4 and 11 by applying a predetermined driving voltage between the electrode layer 4 of the supporting base plate 6 and the electrode layer 11 of the movable thin film 9, and the optical modulation of an incident light is performed, and a return electrode 23, which gives an electrostatic force with which the movable thin film 9 is sucked by applying a driving voltage, is provided on the opposite side of the movable thin film 9 to the supporting base plate 6. COPYRIGHT: (C)2004,JPO&NCIPI
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