METHOD FOR MANUFACTURING PATTERN LAYER FORMED BODY WITH VARIOUS LEVELS

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a pattern layer formed body with various levels by which a pattern layer of various levels comprising a combination of patterns of various levels can be manufactured at the same time by using one material.

SOLUTION: The method includes: a photosensitive layer forming process of applying a photosetting resin composition on a substrate to form a photosensitive layer; an exposure process of exposing the photosensitive layer through a mask which has a light shielding layer to interrupt transmission of light and an opening formed along the pattern of the pattern layer with various levels and which has a filter absorbing≥40% of light in the wavelength range from 200 nm to 500 nm disposed in a part of the opening; and a pattern layer forming process of developing the exposed photosensitive layer to form the pattern layer with various levels in which the photosensitive layer corresponding to the region where the filter is disposed in the opening of the mask gives a part with a low level.

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