Verfahren und Vorrichtung zum Messen einer Probe mit Hilfe eines Rastersondenmikroskops,申请号DE2002194378-传众专利搜索

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发明名称	Verfahren und Vorrichtung zum Messen einer Probe mit Hilfe eines Rastersondenmikroskops
摘要
申请公布号	DE10294378(D2)	申请公布日期	2004.08.26
申请号	DE2002194378	申请日期	2002.09.24
申请人	JPK INSTRUMENTS AG	发明人	KAMPS, JOERN
分类号	G01B21/00;G01B21/30;G01Q20/02;G01Q60/06;(IPC1-7):G12B21/08;G12B21/22	主分类号	G01B21/00
代理机构		代理人
主权项
地址

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