FLUOROCARBON-ORGANOSILICON COPOLYMERS AND COATINGS PREPARED BY HOT-FILAMENT CHEMICAL VAPOR DEPOSITION

摘要

Hot-filament chemical vapor deposition has been used to deposit copolymer thin films consisting of fluorocarbon and siloxane groups. The presence of covalent bonds between the fluorocarbon and organosilicon moieties in the thin film has been confirmed by Infrared, X-ray Photoelectron (XPS) and solid-state ²⁹Si, ¹⁹F, and ¹³C Nuclear Magnetic Resonance (NMR) spectroscopy. The film structure consists of chains with linear and cyclic siloxane groups and CF₂ groups as repeat units.