| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm which is prevented from separation of a piezoelectric body and prevented from decrease in displacement thereof by the piezoelectric body, even if the piezoelectric body has a thickness thicker than a conventional one. SOLUTION: The diaphragm 4 for a droplet ejecting device has the piezoelectric body 12 embedded in a groove 5 formed in a surface 8 thereof. Then one electrode 10 forming a pair of positive and negative electrodes is formed on one side wall 6 of the piezoelectric body 12 with respect to a direction in parallel with a front surface of the diaphragm 4, and the other electrode 11 is formed on the other side wall 7 facing to the side wall 6. COPYRIGHT: (C)2004,JPO&NCIPI
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