| 摘要 |
An array of micro electromechanical switches (MEMs) (21-35) is actuated by a source of one or more light beams, such as a laser (60). A positioning unit (70) is arranged to direct the one or more light beams onto the MEMs, thereby actuating them without the need for control lines. The positioning unit may include a scanning unit (80) which positions a rotatable mirror (72).
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