| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic fine pattern forming method for efficiently forming a ceramic fine pattern without causing a sharp increase of cost or a lowering of production efficiency. SOLUTION: A mold 2 formed of a light transmitting material with a prescribed pattern 1 formed on the lower face is pressed to a photocuring ceramic precursor film 4 formed on a substrate 3 by a sol-gel method, to form a prescribed pattern (a reverse pattern) corresponding to the pattern 1 on the lower face of the mold 2, on the ceramic precursor film 4. In this state, the ceramic precursor film 4 is irradiated with light from a light source through the mold 2 to cure the ceramic precursor film 4 formed with the pattern. Then, the mold 2 is separated from the ceramic precursor film 4. COPYRIGHT: (C)2004,JPO&NCIPI |
