发明名称 PROBE CARD NEEDLE CLEANING FREQUENCY OPTIMIZATION
摘要 A system and method for optimizing cleaning of a probe card including using the probe card to test the functionality of dies on a wafer, when a die fails the probe test, and the probe reports failure to contact the pads of the die, checking the resistance of the probe needles, and if the resistance of a probe needle is greater than a predetermined value triggering probe needle cleaning.
申请公布号 WO2004070405(A1) 申请公布日期 2004.08.19
申请号 WO2003SG00023 申请日期 2003.02.05
申请人 SYSTEMS ON SILICON MANUFACTURING CO. PTE. LTD.;TAN BEN GHEE 发明人 TAN BEN GHEE
分类号 B08B3/00;G01R3/00 主分类号 B08B3/00
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