发明名称 |
Apparatus and methods for determining floating body effects in SOI devices |
摘要 |
Methods and systems are described for determining floating body delay effects in an SOI wafer, wherein test apparatus is provided in a wafer comprising a plurality of floating body devices fabricated in series in the wafer, and a pulse generation circuit providing a pulse output corresponding to a delay time associated with the floating body chain according to an input pulse edge and a propagated pulse edge from the floating body devices.
|
申请公布号 |
US6777708(B1) |
申请公布日期 |
2004.08.17 |
申请号 |
US20030342541 |
申请日期 |
2003.01.15 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
LIN HUNG-JEN;HILL W. EUGENE |
分类号 |
G01R31/28;G01R31/30;H01L23/544;(IPC1-7):H01L23/58;H01L21/66 |
主分类号 |
G01R31/28 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|