Probing method and probing apparatus in which steady load is applied to main chuck

摘要

A probing method including the steps of moving a main chuck to align an object of inspection on the main chuck with probes of a probe card located over the main chuck. The method includes moving the main chuck toward the probe card, thereby bringing electrodes of the object of inspection into contact with the probes, and overdriving the main chuck toward the probe card while measuring a load applied to the object of inspection by contact with the probe and controlling the movement of the main chuck in accordance with the measured load. The method also includes inspecting the electrical properties of the object of inspection using the probes.