| 摘要 |
PROBLEM TO BE SOLVED: To provide a total reflection fluorescent micro measuring device which attains highly accurate automatic focusing. SOLUTION: A visual field diaphragm 6 is arranged at a conjugate position of a measuring plane 3 on an optical path of radiation light and its image is projected on the measuring plane 3. Since light is made incident onto the measuring plane 3 with inclination, when the distance between the measuring plane 3 and an objective lens 10 changes, a position of the visual field diaphragm image on the measuring plane 3 changes according to the distance. The position of the visual field diaphragm image in a focusing state is detected in advance by a position detector 14 and the position information is stored into a memory unit 15. Thereafter when focusing operation is directed, the position of the visual field diaphragm image within the image at that time is detected, an amount of correction calculating section 16 calculates the amount of correction based on deviation of the detected position from the position information stored in the memory unit 15 and a controlling section 17 moves the objective lens 10 according to the amount of correction. Thereby highly accurate focusing can be always attained. COPYRIGHT: (C)2004,JPO&NCIPI |
