METHOD OF FORMING TILTED SURFACE OF MICROLENS ARRAY

摘要

PROBLEM TO BE SOLVED: To efficiently form tilted surfaces which are used to suppress reflected return light on the light incident plane of a microlens array in a wafer state. SOLUTION: A plurality of metal bar juxtaposing plates on each of which seven tilted surfaces are arranged in sawteeth on one side in the longitudinal direction are prepared by a thin film process such as a selected plating process or the like. The plurality of bar juxtaposing plates are inserted into a plurality of bar juxtaposing plate insertion grooves arranged in parallel on a bar juxtaposing plate holding jig so that the titled surfaces are directed upward with their positions lined up. Square pillar-shaped quartz bars B1to B7are respectively held by seven sets of tilted surfaces of the plates and fixed to a fixing substrate 14 by an adhesive layer 16. In a lens substrate 18 on which two dimensionally arrayed lenses L11to L71are formed on one of the main surfaces, a replica layer 20 is formed on the other main surface. Then the tilted surface chain pattern of the bars B1to B7is transferred onto a layer 20 and the pattern on the layer 20 is transferred onto the other main surface of the substrate 18 by an etching process to form the tilted surfaces. COPYRIGHT: (C)2004,JPO&NCIPI