| 摘要 |
PROBLEM TO BE SOLVED: To provide a diagnosing method for an evacuation installation, dispensing with placement of any new device in particular, and detecting not only the position of a leak but also its scale. SOLUTION: According to this diagnosing method for an evacuation installation, the position of a leak and the scale of the leak are specified in an evacuation installation in which a plurality of ejectors are series-connected. This method is characterized in that the plurality of ejectors are sequentially operated from the downstream side (where the vacuum tank side is assumed to be upstream), that the amount of leak in an evacuation system is found for each operation step, and that a difference between the amount of leak in a relevant step and the amount of leak in a step prior to the relevant step is assumed to be the amount of leak in an ejector newly operated in the relevant step, with respect to the respective operation steps. COPYRIGHT: (C)2004,JPO&NCIPI
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