发明名称 Method of plasma enhanced chemical vapor deposition of diamond using methanol-based solutions
摘要 Briefly described, methods of forming diamond are described. A representative method, among others, includes: providing a substrate in a reaction chamber in a non-magnetic-field microwave plasma system; introducing, in the absence of a gas stream, a liquid precursor substantially free of water and containing methanol and at least one carbon and oxygen containing compound having a carbon to oxygen ratio greater than one, into an inlet of the reaction chamber; vaporizing the liquid precursor; and subjecting the vaporized precursor, in the absence of a carrier gas and in the absence in a reactive gas, to a plasma under conditions effective to disassociate the vaporized precursor and promote diamond growth on the substrate in a pressure range from about 70 to 130 Torr.
申请公布号 US2004157005(A1) 申请公布日期 2004.08.12
申请号 US20040772740 申请日期 2004.02.05
申请人 TZENG YONHUA 发明人 TZENG YONHUA
分类号 C23C16/27;C23C16/50;C23C16/503;C23C16/505;C23C16/511;H01J37/32;(IPC1-7):C23C16/26 主分类号 C23C16/27
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